The vacuum system is actually a similar designation of the vacuum unit. The vacuum unit is a set of closed-loop vacuum equipment composed of several vacuum pumps. It does not necessarily have some devices such as radiators and condensers. What is generally known as a vacuum system is certainly that all kinds of parts and components are complete. There are various kinds of vacuum application equipment, but no matter what kind of vacuum application equipment has a set of exhaust system to exclude the gas in the pumped container, in order to obtain the required vacuum conditions in the vacuum container. For example: a vacuum processing container, which is connected to the vacuum pump by pipelines and valves. When the vacuum pump evacuates the container, a vacuum measurement device is required on the container. This constitutes the simplest vacuum pumping system. . How many pumps does the vacuum system have compared to the unit? This is indefinite, let's first recognize the terms of the pump that may exist.
(1) Main pump: In the vacuum system, the vacuum pump used to obtain the required vacuum to meet the specific process requirements, such as the oil diffusion pump in the vacuum coating machine, is the main pump.
(2) Foreline pump: A vacuum pump used to maintain the pressure of a certain vacuum pump before its critical pre-stage pressure. For example, a rotary vane or spool valve pump configured in front of a Roots pump is a foreline pump.
(3) Rough pump: A pump that starts pumping at atmospheric pressure and pumps system pressure to another vacuum pump. For example, the spool pump in a vacuum coating machine is a crude oil pump.
(4) Maintenance of the pump: In the vacuum system, when the gas volume is small, the fore pump cannot be used effectively. To do this, configure a smaller auxiliary pump to maintain the main pump. This pump is called the maintenance pump. If a small rotary vane pump is equipped at the outlet of the diffusion pump, it is to maintain the pump.
In fact, a simple vacuum system can only obtain a rough vacuum, and in order to obtain a high vacuum, a high vacuum pump is usually connected in series in a vacuum system. Roots pumps and screw pumps are high vacuum pumps. When a high vacuum pump is connected in series, valves are usually added at the inlet and outlet of the high vacuum pump, respectively, so that the high vacuum pump can maintain vacuum alone. If the high vacuum pump connected in series is an oil diffusion pump, in order to prevent a large amount of oil vapor from flowing back into the pumped container, a trap, a water-cooled baffle, is usually added at the inlet of the oil diffusion pump. According to the requirements, it is also possible to add a dust collector, a vacuum relay gauge head, a vacuum soft connection pipe, a vacuum pump inlet purge valve, a radiator, etc. in the pipeline, thus constituting a relatively complete high vacuum system.
For more information, please consult China Vacuum Pump Trading Network. (/)
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